Edwards AIGX-D-NW25 Manuel utilisateur
D048-60-880
Issue E Original
Instruction Manual
Active Ion Gauge
Description Item
Number
AIGX - D - NW25 D048-60-000
AIGX - D - DN16CF D048-61-000
AIGX - D - DN40CF D048-02-000
This product has been manufactured under a quality management system certified to ISO 9001:2008
Declaration of Conformity
We, Edwards Limited,
Crawley Business Quarter,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
Active Ion Gauge
AIGX-D-NW25 D048-60-000
AIGX-D-DN16CF D048-61-000
AIGX-D-DN40CF D048-62-000
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN61326-2-3: 2013 Electrical equipment for measurement, control and laboratory
(Class B Emissions, Use. EMC requirements. Particular requirements. Test
Industrial Immunity) configuration, operational conditions and performance criteria for
transducers with integrated or remote signal conditioning
EN50581:2012 Technical Documentation for the Assessment of Electrical and
Electronic Products with respect to the Restriction of Hazardous
Substances
and fulfils all the relevant provisions of
2014/30/EU Electromagnetic Compatibility (EMC) Directive
2011/65/EU Restriction of Certain Hazardous Substances (RoHS) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
09.07.2015, Eastbourne
Larry
Marini,
Senio
r
Technical Manage
r
Date and Place
P200-02-540 Issue G
© Edwards Limited 2013. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
D048-60-880 Issue E
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 1
2 Technical Data ....................................................................................3
2.1 Mechanical data .......................................................................................................... 3
2.2 Performance, operating and storage conditions .................................................................... 3
2.3 Electrical data ............................................................................................................ 3
2.3.1 Electrical supply .........................................................................................................3
2.3.2 Output signal .............................................................................................................4
2.3.3 Gauge and degas enable ................................................................................................ 4
2.3.4 Status outputs ............................................................................................................4
2.3.5 Electrodes ................................................................................................................. 4
2.4 Materials exposed to vacuum .......................................................................................... 4
3 Installation .........................................................................................7
3.1 Unpack and inspect ...................................................................................................... 7
3.2 Fit the AIGX to the vacuum system ................................................................................... 7
3.3 Electrical connections ................................................................................................... 7
3.3.1 Connect to your own supply and control equipment ............................................................... 7
3.3.2 Maximum cable length .................................................................................................. 9
4 Operation ........................................................................................ 11
4.1 Enable and disable the AIGX ..........................................................................................11
4.2 Pressure measurement .................................................................................................11
4.2.1 Calibration in different gases .........................................................................................11
4.3 Emission current selection ............................................................................................12
4.4 Degas the AIGX ..........................................................................................................13
4.5 Over-pressure protection ..............................................................................................13
4.6 Filament selection ......................................................................................................13
4.7 LED status ................................................................................................................13
4.8 Bakeout ...................................................................................................................14
5 Maintenance ..................................................................................... 15
5.1 Fault finding guide ......................................................................................................15
5.2 Replace the body tube .................................................................................................15
5.3 Replace the internal fuse ..............................................................................................15
5.4 Calibration service ......................................................................................................16
6 Storage and Disposal ........................................................................... 17
6.1 Storage ...................................................................................................................17
6.2 Disposal ...................................................................................................................17
7 Spares and Accessories ........................................................................ 19
7.1 Introduction .............................................................................................................19
7.2 Spares .....................................................................................................................19
7.3 Accessories ...............................................................................................................19
For return of equipment, complete the HS Forms at the end of this manual.
gea/0227/07/13
D048-60-880 Issue E
Page ii © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
Illustrations
Figure Page
1 General View of the AIGX .............................................................................................. 2
2 Dimensions ................................................................................................................ 5
3 Schematic Diagram of Recommended Electrical Connections .................................................... 8
4 Pressure Output Signal of AIGX .......................................................................................12
5 Separate the Electronics Housing from the Body Tube ...........................................................14
6 Fuse Replacement ......................................................................................................16
Tables
Table Page
1 Pins on the AIGX Connector ............................................................................................ 8
2 Maximum Recommended Cable Length .............................................................................. 9
3 Gas Calibration Factors For Various Gases ..........................................................................12
4 LED Status ................................................................................................................13
5 Fault Finding Guide .....................................................................................................15
Associated publications
Publication title Publication number
Vacuum pump and vacuum system safety P300-20-000
© Edwards Limited 2013. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
D048-60-880 Issue E
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards Active Ion Gauge (AIGX).
You must use the AIGX as specified in the manual.
Read this manual before you install and operate the AIGX. Important safety information is highlighted as WARNING
and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process
The following IEC warning labels appear on the pump:
The units used throughout this manual conform to the SI international system of units of measurement.
1.2 Description
The AIGX is an ion gauge head and gauge controller in a single compact unit. The gauge operates as a hot filament
ionisation gauge, in which the pressure is measured indirectly as a function of the current.
The measurement range of the AIGX is 5 x 10-10 to 5 x 10-2 Torr (6.6 x 10-10 to 6.6 x 10-2 mbar). Three types of vacuum
connections are available: DN16CF, DN40CF and NW25.
The AIGX requires a 14.5 - 30 V d.c. power supply; it has a 0 to 10 V d.c. analogue output which is related to pressure.
A 9-way electrical connector socket on the AIGX (Figure 1, item 1) is used to connect the AIGX to your electrical
supply and voltmeter.
The AIGX is supplied with two filaments. A switch on top of the gauge selects between filament 1 and 2 (Figure 1,
item 2).
There are two levels of emission currents: 0.1 and 1 mA. The 0.1 mA emission current should be used at pressures
higher than 10-5 Torr and the 1mA emission current should be used at pressures lower than 10-5 Torr.
A protection circuit is built into the gauge to prevent operating the gauge at pressures higher than 5 x 10-2 Torr.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
Warning - Edwards offer European customers a recycling service.
D048-60-880 Issue E
Page 2 © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
The AIGX can be degassed using the degas feature. During degas, the grid voltage is 500 V and the emission current
is 10 mA. The degas is inhibited at high pressure. The maximum duration of degas is three minutes, after which the
gauge returns automatically to its normal mode.
The AIGX is fitted with a status LED (Figure 1, item 3) . This LED indicates the operating status of the gauge.
Figure 1 - General View of the AIGX
1. Electrical connector 3. Status LED
2. Filament select switch 4. Vacuum flange
3
1
2
4
ACTIVE ION GAUGE
AIGX-D-1.33CF
P NO. D04861000
EDWARDS LIMITED
Manor Royal, Crawley, West Sussex
RH10 2LW, ENGLAND
© Edwards Limited 2013. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical Data
D048-60-880 Issue E
2TechnicalData
2.1 Mechanical data
2.2 Performance, operating and storage conditions
2.3 Electrical data
2.3.1 Electrical supply
Dimensions See Figure 2
Mass
AIGX-D-NW25 260 g
AIGX-D-DN16CF 300 g
AIGX-D-DN40CF 510 g
Volume of gauge tube 21 cm3
Enclosure rating IP30
Ambient temperature
operation 0 to 40°C
storage -30 to 70°C
Ambient humidity 90% RH (non-condensing)
up to 31°C reducing to
50 % RH at 40°C
Atmosphere Dry non-conductive only
(pollution degree 1)
Bakeout temperature 200°C (with electronics
removed)
Maximum operating altitude 2000 m
Maximum internal pressure 10 bar absolute
Pressure measurement range 5 x 10-10 to 5 x 10-2 Torr
(6.6 x 10-10 to 6.6 x 10-2 mbar)
Voltage +14.5 V to +30 V d.c.
Internal fuse 1 A (T)
Maximum power consumption
Operating 7 W
Degas 14 W
Electrical connector 9-way ‘D’ type male
D048-60-880 Issue E
Page 4 © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical Data
2.3.2 Output signal
2.3.3 Gauge and degas enable
2.3.4 Status outputs
* required when you use an external d.c. relay connected to the status outputs
2.3.5 Electrodes
2.4 Materials exposed to vacuum
Measurement range 0.7 V to 8.7 V
Gauge disabled 10.0 V
Minimum load impedance 10 kW
Control sense Active low
Active level < 1.5 V
Load rating 30 V d.c., 100 mA max
Back EMF suppression diode *
Min surge rating 1 A
Min reverse voltage rating 100 V
Emission current
Normal 0.1 or 1 mA
Degas 10 mA
Grid voltage
Normal 180 V
Degas 500 V
Filament bias voltage +30 V
Collector voltage 0 V
Collector Tungsten
Grid Tantalum Pt Clad Mo
Filament Yttria coated iridium
Body Stainless Steel
Feedthrough Stainless Steel and UHV
compatible, glass/ceramic
© Edwards Limited 2013. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical Data
D048-60-880 Issue E
Figure 2 - Dimensions
A
B
70
70
D048-60-880 Issue E
Page 6 © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
This page has been intentionally left blank.
Ce manuel convient aux modèles suivants
2
Table des matières
Autres manuels Edwards Contrôleurs
Edwards
Edwards 4-NET-CAT Instructions de montage
Edwards
Edwards ASG2-1000-1/8 NPT Manuel utilisateur
Edwards
Edwards PC2K Manuel utilisateur
Edwards
Edwards D395-90-000 Manuel utilisateur
Edwards
Edwards D395-92-000 Manuel utilisateur
Edwards
Edwards PGC201 Manuel utilisateur
Edwards
Edwards CXS Manuel utilisateur
Edwards
Edwards iTIM E73/A1/T1 Manuel utilisateur
Edwards
Edwards EXC120 Manuel utilisateur
Edwards
Edwards D397-00-000 Manuel utilisateur
