CXI MFC Manuel utilisateur
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Shanghai Cixi Instrument Co., Ltd
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Manifold Gas Flow Controller/meter
Operating Instructions
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Shanghai Cixi Instrument Co., Ltd
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1. product description
1.1 Uses and features
Mass Flow Controller(MFC)Used to accurately measure and control the mass flow of gas.
They play an important role in scientific research and production in various fields such as
semiconductors and integrated circuit industries, special materials disciplines, chemical industry,
and industrial, pharmaceutical, environmental protection, and vacuum lamps. Typical applications
include: electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching,
sputtering, and ion implantation; and coating equipment, optical fiber smelting, microreaction
devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other
analytical instruments
1.2 Main Specifications
1 Flow range: （0~5，10,20,30,50,100,200,300,500...）SCCM
（0~1,2,3,5,10,50,100,200,500...）SLM
2 Accuracy ±1%F.S ±0.5%F.S
3 Linearity ±0.5~1.5%F.S
4 Repeatability ±0.2%F.S
5 Responding time Electrical characteristics:10sec gas characteristics ：
（1~4）sec
6 Differential pressure range 0.1~0.5MPa
7 Max pressure 3MPa
8 Working temperature 0~70℃
9 Digital value RS485 MODBUS
10 Analog value DC 0~5V ，4~20mA
11 Power supply DC +15V/24V，flow meter＜400mA，flow controller＜
600mA
12 Electrical connection DB15
13 Leakage rate 1×10-8SCCSHe
14 Material of base 316L Stainless steel
15 Seal material FKM，nitrile butadiene rubber，chloroprene rubber
16 Glad hand Φ3，Φ6，Φ10，1/8〞,1/4〞，3/8〞
note:
The mass flow meter and mass flow controller are usually calibrated with nitrogen (N2).
The unit of mass flow is stipulated as: SCCM (Standard ml/min); SLM(Standard l/min)
Standard state stipulates: temperature -----273.15K (0℃);
Pressure -----101325 Pa(760mm Hg）
F.S (Full Scale); Full-scale value
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1.3 Working principle
The excellent accuracy, robustness and reliability of the CX series gas mass
flow controllers stem from our unique sensor probes. The sealed probe consists of
two sensing elements - speed sensor and temperature sensor, which can
automatically correct the influence caused by the change of temperature and pressure.
The meter circuit heats the speed sensor to a constant value higher than the gas
temperature, and then measures the cooling effect of the gas flow. The flow is
calculated under the principle that measuring electric power consumed which used to
maintain a constant temperature difference, which is proportional to the mass flow of
the gas. Both sensors are standard platinum resistance temperature detectors (RTD).
Platinum RTD wire is wrapped around a solid ceramic core, firm and reliable. The
entire sensor is sealed in a 316 stainless steel packing case.
Picture(3)Working principle diagram
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2. Quick installation guidance
2.1 Shape and installation dimensions
图三、CX Dimensions of mass flow controller
2.2 Form of gladhand
Picture(4)Installation diagram of double ferrule splice
As shown in picture 4, when installing the splice, after installing the front ferrule, back ferrule, and
nut, tighten the nut and the splice by hand, then tighten with a wrench (The imported Swagelok
splice requires a 1.25-turn wrench to tighten.) to ensure air tightness. Note that double wrench
should be used, with one wrench stuck in the joint and the other to turn the nut. Especially when
removing the nozzle, double wrench must be used, otherwise it will cause loosening of the joint
and affect the sealing.
nut Back Ferrule Front ferrule splice
stack
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2.3 Cable connection plug
Picture(5) ±15VDC Power supply diagram
Picture(6) 24VDC Power supply diagram
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3. Functional operation details
3.1 Review
The CX series flow meter uses a backlight lattice liquid crystal display, which clearly displays a
variety of useful flow data, including instantaneous flow, accumulative flow, temperature, etc. CX
has different display screen, it depends on the type of the order, such as flow meter or controller,
current output or voltage output. The entire CX series has a unified main display screen, gas
selection screen (which may be invalid when certain gases are present), calibration screen, device
information, etc.
In the state of the main screen condition, press the [MENU] button on the lower right corner of the
flow meter to switch the display screen to the menu screen.
3.2 Common operation
Interface specification
picture 1 Monitoring value display status.
Picture 2 Valve control setting status
Picture 3 Menu display status
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Picture 4 Parameter input dialog box
Picture 5 Storage inquiry dialog box
The function of the keys in different display situations:
[Monitoring value display status]：
Press [Left] key to switch current display parameters in sequence: instantaneous flow,
current, medium temperature, accumulated flow, etc.
Press the [Right] key to reverse the current display parameters in order: cumulative
flow, medium temperature, current, instantaneous flow, etc.
Press [MENU/OK] to enter the MENU display status.
[Menu display status]：
Press the [Right] key to switch the menu items of the current menu in sequence.
Press [left] key to return to the previous menu.
Press the [MENU/OK ]key to enter the next menu or the parameter input dialog box].
[Parameter input dialog box]：
Press 【Up】key to increase the number by 1
Press the [Down] key , the number to decrease by 1.
Press [Right] the cursor move one digit to the right.
Press [Left] the cursor move one digit to left.
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Press [MENU/OK] key to confirm
[Storage inquiry dialog box]：
Press [right] key, do not store data or options, go back to the menu item previous
[Storage inquiry dialog box].
Press the [left] key to store data or options, go back to the menu item previous
[Storage inquiry dialog box].
3.3 Functional operation details
3.3.1 flow setting ：
Press [VALVE] key to enter the flow setting interface
Press [Up]key to increase flow setting, press [Down]key to decrease flow setting,
press [Left] key to set flow to 0, press [Right] key to set the flow to full scale. Press the
[VALVE] key to save and return monitor status.
3.3.2 Start/stop flow accumulation：
（1）Under [Monitoring value display status] Status, press [MENU/OK] to enter
[Menu display status]
（2）Press the [MENU/OK] key shows that enter submenu of Usage Flow Setting
If the cumulative function is stopped, the following screen is displayed.
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If the cumulative flow meter has been started, the following screen is displayed
At present, press the [MENU/OK] key to enter the [Storage inquiry dialog box]
At this point, press the [Left] key to modify and store. Press the [right] key to
exit to the previous menu.
3.3.3 Clear flow accumulative value
（1）Under [Monitoring value display status] Status, press [MENU/OK]key to enter
[Menu display status]
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（2）Press [MENU/OK]key to enter the flow setting submenu, press [right] key to make
the menu item “1 Reset Total” in focus;
（3）Press the [MENU/OK] key to display that into the [Storage inquiry dialog box]
（4）Press [Left] key to modify and store. Press [Right] to exit to the previous menu
3.3.4 Small flow signal removal
（1）Under [Monitoring value display status] Status, press [MENU/OK] to enter
[Menu display status]
（2）Press [MENU/OK]key to enter the flow setting submenu, press [right] to make the
menu item “2 Flow Cut Off” in focus;
（3）Press [MENU/OK] key to enter the [Parameter input dialog box], then input the
required data
（4）After modifying the last character, press the [MENU/OK] key to enter the
[Menu display status]
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