Boston Multi-DM Manuel utilisateur

Multi-DM™ Deformable Mirror System

User Manual, Rev. 5.2

This document describes the following products:

Multi-DM – Continuous Deformable Mirror

1.5 µm, 3.5 µm, & 5.5 µm Strokes

Multi-SLM – Segmented Deformable Mirror

1.5 µm & 3.5 µm Strokes

Control Electronics

Multi Driver Control Drive Electronics P/N DRV00120-03

Software

Deformable Mirror Software Development Kit (DM SDK)

Boston Micromachines Corp.

30 Spinelli Place, Suite 103

Cambridge, MA 02138

USA

Tel: +1 617 868 4178

Fax: +1 617 868 7996

WWW: http://www.bostonmicromachines.com

Email: moreinfo@ bostonmicromachines.com

BMC Document Number: DOC-0009 Rev. 5.2

Boston Micromachines Corp, Multi-DM, Multi-SLM, Multi Driver, and the Boston Micromachines

Corp. logo are trademarks of Boston Micromachines Corp. All other trademarks used herein

are property of their respective holders.

No part of this manual may be reproduced in any form or by any means, electronic or

mechanical (including photocopying), nor may its contents be communicated to a third party

without prior written permission of the copyright holder.

The contents are subject to change without prior notice.

Multi-DM™ User Manual Table of Contents

BMC Document Number: DOC-0009 Rev. 5.2 Page i

Table of Contents

1. Multi-DM Quick Start..........................................................................................................1

1.1 New -AND- Experienced Users.............................................................................................. 1

1.2 For Users New to Deformable Mirrors ................................................................................... 1

1.3 For Users Experienced with Deformable Mirrors and Ready to Start.................................... 1

2. Declarations, Certifications, and Warranty......................................................................2

2.1 About this Document.............................................................................................................. 2

2.2 Product Certification ............................................................................................................... 2

2.3 Warranty................................................................................................................................. 2

2.4 Limitations of Warranty........................................................................................................... 2

3. Safety Information..............................................................................................................3

3.1 Types of Warnings in this Document ..................................................................................... 3

3.2 Specific Warnings to Observe................................................................................................ 4

4. Introduction ........................................................................................................................5

4.1 About Boston Micromachines Deformable Mirrors ................................................................ 5

4.2 Included Components ............................................................................................................ 5

4.3 Specifications ......................................................................................................................... 6

4.4 System Requirements ............................................................................................................ 8

5. System Components Overview ........................................................................................9

5.1 System Diagram..................................................................................................................... 9

5.2 Multi-DM Deformable Mirror ................................................................................................. 10

5.3 Multi Driver Electronics......................................................................................................... 11

5.4 SDK and Demonstration Software ....................................................................................... 15

5.5 USB Cable............................................................................................................................ 16

5.6 ESD Wrist Strap ................................................................................................................... 16

5.7 Optical Mount (Optional, Customer-Supplied) ..................................................................... 16

6. BMC SDK Software Installation ......................................................................................17

6.1 BMC SDK Software Installation Instructions........................................................................ 18

6.2 Device-Specific File Installation ........................................................................................... 20

7. Hardware Installation.......................................................................................................21

8. Verifying the DM Installation...........................................................................................23

8.1 Verification Tools.................................................................................................................. 24

8.2 Verifying the Installation ....................................................................................................... 26

8.3 Performing Angular Alignment ............................................................................................. 28

8.4 Performing Positional Alignment .......................................................................................... 28

9. DMShapes Software Overview........................................................................................29

9.1 The DMShapes Window....................................................................................................... 30

9.2 Using the DMShapes Application......................................................................................... 37

9.3 Using DMShapes with Multiple DMs.................................................................................... 42

10. Reference Information .....................................................................................................43

10.1 Glossary ............................................................................................................................... 44

10.2 Help File Locations............................................................................................................... 47

10.3 Multi-DM Mechanical Drawing ............................................................................................. 48

10.4 Mirror Mapping for Multi Driver DRV00120-03..................................................................... 49

10.5 DM Apertures ....................................................................................................................... 51

10.6 Multi Driver DRV00120-03 Mechanical Drawing.................................................................. 55

10.7 Multi Driver Auxiliary Output DE-9 Details ........................................................................... 56

10.8 Multi Driver Dataflow and Error Detection............................................................................ 58

10.9 System Performance............................................................................................................ 60

10.10 Deflection and Inter-Actuator Coupling ................................................................................ 65

Multi-DM™ User Manual Section 1 - Multi-DM Quick Start

BMC Document Number: DOC-0009 Rev. 5.2 Page 1

1. Multi-DM Quick Start

1.1 New -AND- Experienced Users

READ, UNDERSTAND, AND FOLLOW the Operator Safety and System Damage

Warnings in Section 3, Safety Information.

1.2 For Users New to Deformable Mirrors

To learn what Deformable Mirrors are and how they are used

oRead through Section 5, System Components Overview

oRead through some of the technical information in

Section 10, Reference Information

oVisit the Boston Micromachines website: www.bostonmicromachines.com

Follow the “Education” link at the top of the page

Follow the “Want to Learn More?” link at the bottom of the page

1.3 For Users Experienced with Deformable Mirrors and Ready to Start

TO GET READY to install your Deformable Mirror:

oFollow Section 3, Safety Information

oFollow Section 4, Introduction

oFollow Section 5, System Components Overview

TO INSTALL your Deformable Mirror:

oFollow Section 6, BMC SDK Software Installation

oFollow Section 7, Hardware Installation

oFollow Section 8, Verifying the DM Installation

Multi-DM™ User Manual Section 2 - Declarations, Certifications, and Warranty

BMC Document Number: DOC-0009 Rev. 5.2 Page 2

2. Declarations, Certifications, and Warranty

2.1 About this Document

This manual is designed to help the reader understand, install, and operate the Multi-DM

and Multi Driver. It assumes that the reader has a fundamental understanding of electronic

components, electronic instruments, optics, and applicable safety procedures.

The manual describes the physical specifications of the Multi-DM and Multi Driver as well

as the installation procedures that are required to use the system.

This document is available as a PDF file. Updated releases may be available by

contacting [email protected].

2.2 Product Certification

Boston Micromachines Corporation certifies that the Multi-DM, Multi Driver, and all related

components, are fully functional at time of shipment.

The Multi-DM included in this system has been tested and certified to function beyond the

hardware limits set on the Multi Driver. Therefore, a “safety factor” need not be applied to

the commands which send voltage to the mirror during normal operation.

2.3 Warranty

Any software or hardware failures due to manufacturing or inherent defects will be

repaired or replaced (at Boston Micromachines’ discretion) for a period of 1 year from

delivery.

For warranty questions or to initiate the warranty process, contact Boston Micromachines’

technical support at +1-617-868-4178 or [email protected].

2.4 Limitations of Warranty

Warranty does not cover any damage incurred from mishandling or misuse of the DM

or driver including failure due to electrostatic discharge (ESD), excessive optical intensity,

or by not following the instructions included in this document.

Warranty does not cover any damage resulting from a customer’s decision to purchase

or use nonstandard equipment, including but not limited to a removable window or drive

electronics not sold by Boston Micromachines.

Multi-DM™ User Manual Section 3 - Safety Information

BMC Document Number: DOC-0009 Rev. 5.2 Page 3

3. Safety Information

3.1 Types of Warnings in this Document

The following types of warnings are used in this document.

3.1.1 Operator Safety Warning

Failure to observe the stated precaution(s) or perform the procedural step(s)

exactly as defined, may cause serious injury or death to the operator.

3.1.2 System Damage Warning

Failure to observe the stated precaution(s) or perform the procedural step(s)

exactly as defined, may cause irreparable damage to the DM, the Driver Electronics,

or associated equipment.

3.1.3 Important Information

Take particular care to read and understand this information.

It will save you time and effort and help avoid preventable errors.

Multi-DM™ User Manual Section 3 - Safety Information

BMC Document Number: DOC-0009 Rev. 5.2 Page 4

3.2 Specific Warnings to Observe

The following warnings apply in a general sense throughout this document.

Additional warnings can be found at critical points in this document.

SHOCK HAZARD

Voltages up to 300V can be present on the deformable mirror (DM), packaging,

electrodes, cable, and electronics driver.

DO NOT come into contact with these items when the system is powered on.

DEFORMABLE MIRROR ESD DAMAGE

The DM is highly sensitive to electrostatic discharge.

Always handle the DM in an electrostatically sensitive environment

while wearing a Grounding Wrist Strap (shipped with system).

MULTI DRIVER ESD DAMAGE

The Multi Driver is highly sensitive to electrostatic discharge.

Always handle the Driver in an electrostatically sensitive environment

while wearing a Grounding Wrist Strap.

Avoid touching any electrical interconnections.

MULTI-DM HAS NO USER SERVICEABLE PARTS

Do not open or disassemble in any way.

Contact Boston Micromachines for any service required.

MULTI DRIVER HAS NO USER SERVICEABLE PARTS

Do not open or disassemble in any way.

Contact Boston Micromachines for any service required.

Multi-DM™ User Manual Section 4 - Introduction

BMC Document Number: DOC-0009 Rev. 5.2 Page 5

4. Introduction

4.1 About Boston Micromachines Deformable Mirrors

Boston Micromachines (BMC) Deformable Mirrors (DMs) are advanced wavefront control

devices that consist of a mirror membrane supported by an underlying actuator array.

•Each actuator can be individually deflected by electrostatic actuation,

thus changing the shape of the mirror, to achieve the desired pattern of deformation.

•BMC DMs are capable of achieving high spatial resolution shapes

due to high actuator count and low to no inter-actuator coupling.

•BMC DMs are available with continuous or segmented mirror surfaces.

•BMC DMs exhibit highly stable operation with no hysteresis.

•BMC provides compact, high resolution DM drive electronics

that are suitable for bench-top or OEM integration.

•BMC's DM Software Development Kit (SDK), including Windows and Linux hardware

drivers, software drivers for C/C++, Python, MathWorks MATLAB and National

Instruments LabVIEW software, and command line and GUI based DM control

applications.

•BMC's DM software is capable of operating multiple DM systems simultaneously.

4.2 Included Components

All Multi- series DMs are supplied with the following items:

•The Multi-DM Deformable Mirror.

For detailed specifications see Section 4.3.1, Multi Deformable Mirrors.

For detailed description see Section 5.1, System Diagram.

•The Multi Driver Control Electronics.

For detailed specifications see Section 4.3.2, Multi Driver.

For detailed description see Section 5.3, Multi Driver Electronics.

•The BMC Deformable Mirror Software Development Kit (SDK).

For detailed information see Section 5.4, SDK and Demonstration Software.

•A DM- and Driver-specific configuration file.

•A DM-specific half bias flat shape data file.

•A DM- and Driver-specific System Data Sheet file.

•A USB Male A to Male Mini-B cable for connecting the Multi Driver to a PC.

•An ESD wrist strap.

•A complete set of hardware and software documentation.

Multi-DM™ User Manual Section 4 - Introduction

BMC Document Number: DOC-0009 Rev. 5.2 Page 6

4.3 Specifications

4.3.1 Multi Deformable Mirrors

DM Model Number

Multi-1.5 *

Multi-3.5

Multi-3.5L

Multi-5.5

Multi-1.5-

SLM

Multi-3.5-

SLM

Maximum Stroke (µm) 1.5 3.5 3.5 5.5 1.5 3.5

Actuator Pitch (µm) 300 400 450 450 300 400

Full Aperture Dia. (mm) 4.50 6.00 6.75 6.75 4.80 6.40

Active Aperture Dia. (mm)

3.30

4.40

4.95

3.60

4.80

Recommended Optical

Aperture Dia. (mm)

2.70 3.60 4.05 4.05 3.60 4.80

Inter-Actuator Coupling

15%

13%

22%

Mechanical Response

time for a 100 nm step

10% - 90% deflection

(μs) **

<40 <75 <75 <100 <35 <80

Avg. Step Size (nm)

< 1

< 3

< 1

Mirror Surface Continuous Membrane Surface Segmented Mirror

Surface

Actuator Count

140

Actuator Layout 12 x 12 square without corners

See Section 10.4, Mirror Mapping for Multi Driver DRV00120-03

Actuator Count

Across Aperture

Mirror Coating Aluminum, Gold, or Protected Silver

Surface Quality

(when driven flat)

< 30 nm RMS

< 40 nm RMS

Protective Window

(with Anti-Reflective

Coating)

350-700nm, 650-1050nm, 1050-1700nm, 400-1100nm,

or 550-2400nm

Recommended Operating

Temperature (°C)

-10 – 30

Recommended Storage

Temperature (°C)

-10 – 80

Recommended Relative

Humidity (%RH)

< 30

* The Multi-1.5 is not available for new designs. New optical designs should use the Multi-C-1.5.

** High speed X-Driver option available, contact BMC for more information.

Multi-DM™ User Manual Section 4 - Introduction

BMC Document Number: DOC-0009 Rev. 5.2 Page 7

Every deformable mirror can be safely actuated to the maximum stroke specified.

No safety factor is necessary to safeguard proper function of the mirror.

Throughout this document, unless otherwise noted, all references to,

and descriptions of, the Multi-DM also apply to the Multi-SLM version.

4.3.2 Multi Driver

BMC Part Number

DRV00120-03

Computer Interface: USB 2.0

Max Frame Rate: 8 kHz (125 μs USB packet size)

Voltage for Max Deflection Up to 300V (device-specific)

Slew Rate 2V/μs

Slew Time to Max Deflection

Up to 150 μs (device-specific based on Max Voltage)

Resolution:

14-Bit

Dimensions (W x D x H):

9 in. x 7 in. x 2.5 in.

Power Requirements: Chassis requires 24V, 2A Max

which is supplied by AC\DC converter requiring

100-240 Volt, 1.6 A, 50-60 Hz

Output Voltage Limit In hardware to ensure safe mirror operation

Driver Voltage limits are specific to the specified Boston Micromachines DM.

If multiple systems are ordered, DO NOT mix and match DMs and driver electronics.

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