Agilent Technologies Varian TriScroll 620 Series Manuel utilisateur

INSTALLATION AND

OPERATION MANUAL

vacuum technologies

DRAFT 4/2/07

TriScrollTM 620 Series

Dry Scroll

Vacuum Pump

Manual No. 699904343

Revision E

April 2007

NOTICE: This document contains references to Varian.

Please note that Varian, Inc. is now part of Agilent

Technologies. For more information, go to

www.agilent.com/chem.

TriScroll 620 Series Vacuum Pump

Varian, Inc.

DRAFT 4/2/07

TriScroll™620

Dry Scroll Vacuum Pump

TriScroll is a trademark of Varian, Inc.

iii

TriScroll 620 Series Vacuum Pump

Contents

Declaration of Conformity

Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .vi

Warranty Replacement and Adjustment . . . . . . . .vi

Instructions for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

General Information . . . . . . . . . . . . . . . . . . . . . . . . . 1

Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

Installation Requirements . . . . . . . . . . . . . . . . . . . . . 2

Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

Start up Procedure . . . . . . . . . . . . . . . . . . . . . . . . 2

Shutdown Procedure . . . . . . . . . . . . . . . . . . . . . . 2

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

Technical Information . . . . . . . . . . . . . . . . . . . . . . . . . 3

Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . 5

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . 7

Single Phase Motor Connection . . . . . . . . . . . . . . 7

Mechanical Connections . . . . . . . . . . . . . . . . . . . . . 7

Pump Location . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Rotation of the Pump Inlet

with Respect to the Motor Frame . . . . . . . . . . . . . 8

Pump Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Pump Exhaust. . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Optional Isolation Valve. . . . . . . . . . . . . . . . . . . . . . 8

Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Bearing Purge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Purge Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

General Information . . . . . . . . . . . . . . . . . . . . . . 11

Related TriScroll Manuals. . . . . . . . . . . . . . . . . . 11

Maintenance and Tooling Kits . . . . . . . . . . . . . . 11

Factory Service Options . . . . . . . . . . . . . . . . . . . 12

Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Contacting Varian. . . . . . . . . . . . . . . . . . . . . . . . 12

Request for Return Health and Safety Certification

List of Figures

Figure Caption Page

1 Interface Drawing with Dimensions . . . . . . . 4

2 Pumping Speed Curves . . . . . . . . . . . . . . . . 4

3 TriScroll 620 Vacuum Pump . . . . . . . . . . . . . 5

4 Single Phase Motor Electrical Connections . . 7

5 Isolation Valve Location . . . . . . . . . . . . . . . . 8

List of Tables

Table Title Page

1 Specifications . . . . . . . . . . . . . . . . . . . . . . . . 3

2 Full Load Motor Currents, Amps . . . . . . . . . . 7

3 VPI Valve Installation Data . . . . . . . . . . . . . . 9

4 Troubleshooting Chart. . . . . . . . . . . . . . . . . 10

5 Other Related Manuals . . . . . . . . . . . . . . . . 11

6 Maintenance and Tooling Kits. . . . . . . . . . . 11

7 Factory Service Options . . . . . . . . . . . . . . . 12

8 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . 12

TriScroll 620 Series Vacuum Pump

This page intentionally left blank.

declare under our sole responsibility that the product,

erklären, in alleniniger Verantwortung, daß dieses Produkt,

déclarons sous notre seule responsabilité que le produit,

declaramos, bajo nuestra sola responsabilidad, que el producto,

verklaren onder onze verantwoordelijkheid, dat het product,

dichiariamo sotto nostra unica responsabilità, che il prodotto,

Declaration of Conformity

Konformitätserklärung

Déclaration de Conformité

Declaración de Conformidad

Verklaring de Overeenstemming

Dichiarazione di Conformità

to which this declaration relates is in conformity with the following standard(s) or other normative documents.

auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.

auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).

al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).

waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.

a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

Wir

Nous

Nosotros

Wij

Noi

Varian, Inc.

Lexington, MA, 02421-3133 USA

121 Hartwell Avenue

Frederick C. Campbell

Operations Manager

March 2003

Lexington, Massachusetts, USA

Varian, Inc.

TriScroll Series Vacuum Pump

98/37/EEC, Machinery Directive

EN 1012-2:1996 Compressors and Vacuum pumps Safety Reqmts; Part 2 Vacuum Pumps

EN 1050:1996 Safety of machinery - principles for risk assessment

EN 60204-1 Electrical equipment of industrial machines; general requirements

73/023/EEC, Low Voltage Directive

EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance

89/336/EEC, Electromagnetic Compatibility Directive

EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test

Declaration of Conformity

TriScroll 620 Series Vacuum Pump

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for twelve

(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty

claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the

purchase price of the Product. Items expendable in normal use are not covered by this warranty. All

warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole

opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of

Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of

the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired

portion of the original warranty period applicable to the repaired or replaced parts. After expiration of

the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,

and transportation.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or

damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of

law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any

warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements

made by any person, including representatives of Seller, which are inconsistent or in conflict with the

terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an

officer of Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,

and must be received within the applicable warranty period by Seller or its authorized representative.

Such claims should include the Product serial number, the date of shipment, and a full description of

the circumstances giving rise to the claim. Before any Products are returned for repair and/or

adjustment, written authorization from Seller or its authorized representative for the return and

instructions as to how and where these Products should be returned must be obtained. Any Product

returned to Seller for examination shall be prepaid via the means of transportation indicated as

acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and

any warranty claim on any item that has been altered or has been returned by non-acceptable means of

transportation. When any Product is returned for examination and inspection, or for any other reason,

Customer shall be responsible for all damage resulting from improper packing or handling, and for loss

in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole

responsibility for determining the cause and nature of failure, and Seller’s determination with regard

thereto shall be final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will

be notified and the Product returned at its expense; in addition, a charge for testing and examination

may be made on Products so returned.

3/1/00

TriScroll 620 Series Vacuum Pump

DRAFT 4/2/07

Instructions for Use

General Information

This equipment is designed for use by professionals. The

user should read this instruction manual and any other

additional information supplied by Varian before operating

the equipment. Varian will not be held responsible for any

events that occur due to non-compliance with these

instructions, improper use by untrained persons,

non-authorized interference with the equipment, or any

action contrary to that provided for by specific national

standards.

The TriScroll™ 620 is a dry scroll vacuum pump

specifically optimized for helium leak detection

equipment. This pump is suitable for pumping air or inert

gases. The pump is not intended to pump toxic, corrosive,

explosive, or particulate-forming gases.

The following paragraphs contain all the information

necessary to guarantee the safety of the operator when

using the equipment. Detailed information is supplied in

“Technical Information” on page 3.

This manual uses the following standard safety protocol:

Storage

When transporting and storing the pump, the following

environmental requirements should not be exceeded:

Preparation for Installation

The pump is supplied in a special protective packing. If

this shows signs of damage, which may have occurred

during transport, contact your local sales office.

Total weight of the packing, including the pump, is

approximately 40 kg (87 lbs).

WARNING The warning messages are for attracting

the attention of the operator to a partic-

ular procedure or practice which, if not

followed correctly, could lead to serious

injury.

CAUTION The caution messages are displayed

before procedures, which if not fol-

lowed, could cause damage to the

equipment.

NOTE The notes contain important informa-

tion taken from the text.

Temperature: –20 °C to 60 °C (–4 °F to 140 °F)

Relative humidity: 0 to 95% (non-condensing)

WARNING When unpacking the pump, be sure not

to drop it, and avoid any kind of sudden

impact or shock vibration to it.

WARNING The TriScroll 620 weighs 32 kg (70 lbs).

To avoid injury, use proper lifting tech-

niques when moving the pump.

NOTE Normal exposure to the environment

cannot damage the pump. Neverthe-

less, it is advisable to keep the pump

inlet closed until the pump is installed

in the system.

DRAFT 4/2/07

TriScroll 620 Series Vacuum Pump

Installation Requirements

Do not install or use the pump in an environment

exposed to atmospheric agents (rain, snow, ice), dust,

aggressive gases, or in explosive environments or those

with a high fire risk.

During operation, the following environmental

conditions must be respected:

Operation

In order to reach ultimate vacuum, the pump must be left

running for about an hour with the inlet sealed.

Unlike conventional oil-sealed pumps, Varian’s dry scroll

pumps do not have fluid to cleanse them of accumulated

dust and debris. Run the pump periodically at atmosphere

for a minute or two to flush out the pump. Flush the pump

regularly and adjust this schedule according to your

specific conditions.

Start up Procedure

1. Be sure that the vacuum system isolation valve is

closed.

2. Turn on power to the pump.

3. Open the isolation valve.

Shutdown Procedure

1. Close the vacuum system isolation valve. This

prevents debris in pump from being transported into

the vacuum system.

2. Turn off power to the pump.

Maintenance

Personnel responsible for pump operation and

maintenance must be well-trained and aware of the

accident prevention rules.

If a pump is to be discarded, it must be disposed of in

accordance with specific national and local standards.

Temperature: +5 °C to +40 °C (41 °F to 104 °F)

Relative humidity: 0 to 95% (non-condensing)

CAUTION As supplied from the factory, the pump

is configured for low voltage. Verify that

the configuration matches the supply

voltage.

If voltage changeover is required,

configure the voltage as described in

“Electrical Connections” on page 7.

WARNING During operation the outer surface of

the motor housing can become hot.

Avoid touching the motor housing dur-

ing pump operaion.

WARNING The pump is designed for operation

with neutral or noncorrosive fluids. It

is absolutely forbidden to use it with

potentially explosive, inflammable or

poisonous substances.

WARNING ❑Death may result from contact with

high voltages. Always take extreme care

and observe the accident prevention

regulations in force.

❑When the machine is powered up,

be careful of moving parts and high

voltages.

❑If you have to perform maintenance

on the pump after a considerable time

in operation, allow the pump to cool as

the temperature of the outer surface

may be in excess of 55 °C (131 °F).

❑Always disconnect your power

supply to the pump before beginning

maintenance work.

NOTE Before returning the pump to the factory

for repair, the “Health and Safety” sheet

attached to this instruction manual must

be completed and sent to the local sales

office. A copy of the sheet must be

inserted in the pump package before

shipping.

TriScroll 620 Series Vacuum Pump

DRAFT 4/2/07

Technical Information

Table 1 Specifications

Model TriScroll™ 620 Dry Scroll Vacuum Pump

Interface dimensions See Figure 1

Peak pumping speed 50 Hz: 420 l/m, 25.2 m3/hr (14.8 cfm)

60 Hz: 500 l/m, 30 m3/hr (17.7 cfm)

Media Clean air. No toxic, corrosive, explosive or particulate forming gases

Ultimate pressure (Torr) 7.0 x 10-3 Torr (9.3 x 10-3 mbar)

Maximum inlet pressure 1.0 atmosphere (0 psig)

Maximum outlet pressure 1.1 atmosphere (1.5 psig)

Inlet connection NW40

Exhaust connection Female 3/8" National Pipe Thread (NW25 adapter provided)

Gas ballast Female 1/4" National Pipe Thread (40 Micron sintered filter provided)

Ambient operating temperature 5 °C to 40 °C (41 °F to 104 °F)

Storage temperature –20 °C to 60 °C (–4 °F to 140 °F)

Motor rating 1.0 HP (0.76 kW)

Operating voltages Single phase models:

❑50-60 Hz/100-115:200-230 VAC

Motor full load currents See Table 2 on page 7

Motor thermal protection Type U automatic

Operating speed 60 Hz: 1725 RPM, 50 Hz: 1425 RPM

Cooling system Air-cooled

Weight Pump only: 32 kg (70 lbs)

Shipping weight: 40 kg (87 lbs)

Noise level (per ISO 11201) 68 dB(A)

Vibration level at inlet (per ISO 10816-1) 6.3 mm/sec

DRAFT 4/2/07

TriScroll 620 Series Vacuum Pump

Figure 1 Interface Drawing with Dimensions

Figure 2 Pumping Speed Curves

355

(13.98)

(.50)

(.85)

Intake (NW25)

NW25 Exhaust extension

included but

not installed

Exhaust (3/8NPT)

port swivels 360

ø300

(ø11.80)

472 (18.57) Single Phase

184

(7.25)

(1.48)

105

(4.13)

(3.22)

145 (5.69)

102

(4.02)

176

(6.94)

4 x ø11(ø.43) Thru

Ce manuel convient aux modèles suivants

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