Aerotech PRO165SLE Series Manuel utilisateur
Revision 2.01
PRO165SL and SLEMechanical Bearing,
Ball-Screw Stage
HARDWAREMANUAL
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disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2007-2023, Aerotech, Inc., All rights reserved.
Table of Contents
PRO165SL and SLEMechanical Bearing, Ball-Screw Stage 1
Table of Contents 3
List of Figures 4
List of Tables 5
EU Declaration of Incorporation 6
UKCADeclaration of Incorporation 7
Safety Procedures and Warnings 8
Installation and Operation 9
Electrical Warnings 10
Motor-Related Warnings 11
Pinch Points 12
Handling and Storage 13
Chapter 1: Overview 15
1.1. Environmental Specifications 17
1.2. Accuracy and Temperature Effects 18
1.3. Basic Specifications 19
1.4. Vacuum Operation 21
Chapter 2: Installation 23
2.1. Dimensions 23
2.2. Securing the Stage to the Mounting Surface 28
2.3. Attaching the Payload to the Stage 29
Chapter 3: Electrical Installation 33
3.1. Motor and Feedback Connectors 34
3.2. Motor and Feedback Wiring 39
3.3. Motor and Feedback Specifications 41
3.4. Limits, Marker, and Machine Direction 45
3.5. Motor and Feedback Phasing 46
Chapter 4: Maintenance 49
4.1. Service and Inspection Schedule 49
4.2. Cleaning and Lubrication 50
4.3. Motor Mounting 54
4.4. Side Seal Belt Replacement 57
4.5. Foldback Motor Belt Adjustment 65
4.6. Troubleshooting 68
Appendix A: Warranty and Field Service 69
Appendix B: Revision History 71
Index 73
Hardware Manual PRO165SL/SLE
www.aerotech.com 3
List of Figures
Figure 2-1: PRO165SL Dimensions 23
Figure 2-2: PRO165SL Tabletop Dimensions (-TT2/-TT3 Option) 24
Figure 2-3: PRO165SLE Dimensions 25
Figure 2-4: PRO165SLETabletop Dimensions (-TT3 Option) 26
Figure 2-5: Z-Axis Bracket Dimensions 27
Figure 2-6: Stage Orientations 30
Figure 2-7: Cantilevered Load Capability 31
Figure 2-8: Load Torque Equation 31
Figure 2-9: Torque Required to Turn Ball Screw in Vertical Orientation 31
Figure 3-1: Brushless Motor and Feedback Wiring [-SL Option] 39
Figure 3-2: Brushless Motor and Feedback Wiring [-SLE Option] 40
Figure 3-3: Machine Direction 45
Figure 3-4: Hall Phasing Diagram 46
Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) 47
Figure 3-6: Digital Encoder Phasing Reference Diagram (Sine Wave) 47
Figure 4-1: Hardcover Rear End Plate Removal 52
Figure 4-2: Hardcover Screw Removal 52
Figure 4-3: Hardcover Removal 53
Figure 4-4: Motor Mounting Overview 54
Figure 4-5: Attach the Coupling Adapter to the Motor Shaft 55
Figure 4-6: Attach the Motor the Stage 55
Figure 4-7: Tighten the Shaft Coupling to the Drive Screw 56
Figure 4-8: Belt Removal at the Attachment Pins 58
Figure 4-9: Spring Location Detail 59
Figure 4-10: PullThrough Method 60
Figure 4-11: Stage Table Cover Plate Removal 61
Figure 4-12: Manual Feed Method 62
Figure 4-13: Belt Wrap 62
Figure 4-14: Belt Alignment 63
Figure 4-15: Belt Trim 64
Figure 4-16: Foldback Motor Cover Removal 66
Figure 4-17: Foldback Motor Part Callouts 67
Figure 4-18: Lubricate the Pulley Flanges 67
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List of Tables
Table 1-1: Model Numbers and Ordering Options 15
Table 1-2: Environmental Specifications 17
Table 1-3: PRO165SL/SLESeries Specifications (-050 to -250) 19
Table 1-4: PRO165SL/SLE Series Specifications (-300 to -600) 20
Table 2-1: Stage Mounting Surface Flatness Requirement 28
Table 2-2: Stage to Mounting Surface Hardware 28
Table 2-3: Payload Mounting Surface Flatness Requirement 29
Table 3-1: Brushless Motor Connector Pinout 35
Table 3-2: Mating Connector Part Numbers for the Brushless Motor Connector 35
Table 3-3: Brushless Motor Feedback Connector Pinout 36
Table 3-4: Mating Connector Part Numbers for the Brushless Motor Feedback Connector 36
Table 3-5: Linear Encoder Connector Pinout (-SLE only) 37
Table 3-6: Mating Connector Part Numbers for the Encoder Connector 37
Table 3-7: Limit Connector Wiring 38
Table 3-8: Mating Connector Part Numbers for the Limit Connector 38
Table 3-9: Hall-Effect Sensor Specifications 41
Table 3-10: Thermistor Specifications (BMSMotor Options) 41
Table 3-11: Encoder Specifications 41
Table 3-12: Rotary Encoder Resolution Specifications 41
Table 3-13: Linear Encoder Resolution Specifications 42
Table 3-14: Limit Switch Specifications 42
Table 3-15: Brake Specifications 42
Table 3-16: PRO165SL/SLE Motor Specifications (BMS100) 43
Table 3-17: PRO165SL/SLE Motor Specifications (BM130) 44
Table 4-1: Hardware Requirements 54
Table 4-2: Side Seal Belt Replacement Kit Ordering Guide 57
Hardware Manual PRO165SL/SLE
www.aerotech.com 5
EU Declaration of Incorporation
Manufacturer Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
PRO165SL/SLE stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended; and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of Machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of Machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements
of the following directive(s):
EU 2015/863 Directive, Restricted Substances (RoHS 3)
Authorized
Representative: / Norbert Ludwig
Managing Director
Aerotech GmbH
Gustav-Weißkopf-Str.18
90768 Fürth
Germany
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 7/20/2023
PRO165SL/SLE Hardware Manual
6 www.aerotech.com
UKCADeclaration of Incorporation
Manufacturer Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
PRO165SL/SLE stage
To which this declaration relates, meets the essential health and safety requirements and is in
conformity with the relevant UK Legislation listed below:
Supply of Machinery (Safety) Regulations 2008
Hazardous Substances in Electrical and Electronic Equipment Regulations
2012
Using the relevant section of the following UK Designated Standards and other normative
documents when installed in accordance with the installation instructions supplied by the
manufacturer.
EN ISO 12100:2010
Safety of Machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of Machinery - Electrical equipment of machines - Part 1:General
requirements
and furthermore declares that it is not allowed to put the product into service until the machinery
into which it is to be incorporated or of which it is to be a component has been found and declared
to be in conformity with the provisions of the Supply of Machinery (Safety) Regulations 2008 UK
Legislation and with national implementing legislation, for example, as a whole, including the
equipment referred to in this Declaration.
Authorized
Representative: / Simon Smith
Managing Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 7/20/2023
Hardware Manual PRO165SL/SLE
www.aerotech.com 7
Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
stage.
lRead all parts of this manual before you install or operate the stage or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the
moment of the safety note or if you fail to obey the safety note.
Shock/Electrocution Hazard Pinch, Shear, or Crush Hazard
General/Conditional Awareness Rotational Machinery Hazard
Hot Surface Hazard Pinch/Entanglement Hazard
Magnetic Field Hazard Trip Hazard
Heavy, Bulky Lifting Hazard Appropriate Equipment Required
Pressure/Explosive Atmosphere
Hazard Electrostatic Discharge Hazard
A blue circle symbol is an action or tip that you should obey. Some examples include:
General tip Read the manual/section
Wear personal protective equipment
(PPE): Safety Glasses If applicable, do not lift unassisted
Wear personal protective equipment
(PPE): Gloves
Wear personal protective equipment
(PPE): Hearing Protection
PRO165SL/SLE Hardware Manual
8 www.aerotech.com
Installation and Operation
To decrease the risk of damage to the equipment, you must obey the precautions that follow.
DANGER: General Hazard Warning!
This product can produce high forces and move at velocities that could cause injury.
The user is responsible for its safe operation. The following general equation is
provided to assist with risk assessments in regards to contact and pinch points:
WARNING: General Hazard Warning!
lOnly trained operators should operate this equipment.
lAll service and maintenance must be done by approved personnel.
lUse this product only in environments and operating conditions that are approved in
this manual.
lNever install or operate equipment that appears to be damaged.
lOn stages with BMSmotors: the motor over-temperature sensor must be monitored
by the drive. Use it to shut down the drive if the motor overheats.
lMake sure that the product is securely mounted before you operate it.
lMake sure that all pneumatic lines are securely connected.
lUse care when you move the stage or you could negatively affect the performance of
it.
WARNING:Trip Hazard!
Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could
introduce trip hazards around the system that could result in physical injury or could
damage the equipment.
Hardware Manual PRO165SL/SLE
www.aerotech.com 9
Electrical Warnings
To decrease the risk of electrical shock, injury, death, and damage to the equipment, obey the
precautions that follow.
DANGER: Electrical Shock Hazard!
lStage motor phase voltage levels could be hazardous live.
lPersonnel are protected from hazardous voltages unless electrical interconnections,
protective bonding (safety ground), or motor/stage enclosures are compromised.
lDo not connect or disconnect stage/motor interconnections while connected to a live
electrical power source.
lBefore you set up or do maintenance, disconnect electrical power.
lIt is the responsibility of the End User/System Integrator to make sure that stages are
properly connected and grounded per Engineering Standards and applicable safety
requirements.
lIt is the responsibility of the End User/System Integrator to configure the system
drive or controller within the Aerotech motor/stage electrical and mechanical
specifications.
PRO165SL/SLE Hardware Manual
10 www.aerotech.com
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