Adixen ATH 2300 M Manuel utilisateur
Operating instructions
Operating instructions
Translated from original version
Translated from original version
ATH 2300 M/MT
Turbopumps
EN
EN
GB 01717 - Edition 06 - Nov 12
1/2
ATH 2300 M/MT - Turbopumps
Welcome
Dear Customer,
You have just purchased
an adixen Magnetically
turbopump.
We would like to thank you
and are proud to count you
as one of our customers.
This product has benefited
from adixen Vacuum
Products many years of
experience in the field of
turbopump design.
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention
on your pump and to pay
particular attention to the
equipment installation and
start-up section.
Applications:
SEMICONDUCTOR APPLICATIONS:
Plasma etching, Ion implantation,
Sputtering, Plasma deposition.
OTHERS APPLICATIONS:
Electron microscopes, Surface analysis,
Research and development, High energy physics, Space simulation,
Accelerators.
Advantages:
High throughput - Quiet and clean vacuum - Corrosion proof -
High MTBF - Minimum size, volume and weight - Smart and
compact electronic controller - Reliability - Maintenance free -
Battery free - Easy integration.
This operating instruction manual includes only the instructions to connect
the pump to the equipment. Refer to the controller operating instructions
to power and use the pump (chapter B, C and D).
This pumping component is designed to generate vacuum by pumping on
gases, but no liquids neither solids. It is dedicated for running in industrial
environments.
The integrator of this component must provide all operator safety measures
mainly against hot surfaces.
This pumping component must not operate in an area with risk of explosion.
Consult us to study a solution.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT
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ATH 2300 M/MT - Turbopumps
GB 01717 - Edition 06 - Nov 12
Copyright/Intellectual property:
The use of adixen products are subject to copyright
and intellectual property rights in force in any
jurisdiction.
All rights reserved, including copying this document in
whole or any part without prior written authorization
from adixen Vacuum Products.
Specifications and information are subject to change
without notice by adixen Vacuum Products.
This product complies with the requirements of European Directives, listed
in the Declaration of Conformity contained in sheet G 100 of the controller
operating instructions.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT
GB 01718 - Edition 05 - Nov 12
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MANUAL REFERENCE: 108895
EDITION: 06 - January 2013 General contents
ATH 2300 M/MT Operating manual
Translated from original version
Chapter A INTRODUCTION
A 150 - Introduction to the ATH 2300 M/MT pumps
A 200 - Control loop of the pump
A 210 - The pump operating principle
A 400 - Technical characteristics of the pump
A 510 - The accessories of the pump
A 515 - Pump accessory dimensions
Chapter B START-UP
B 100 - Safety instructions for installation
B 201 - Unpacking and storage of the pump
B 300 - Pump connections to an installation
B 310 - Inlet and exhaust connections
B 330 - Nitrogen purge and inlet air valve device connections
B 340 - Water cooling connection
B 401 - Typical electrical wiring diagram
Chapter C OPERATION
C 100 - Safety instructions for product use
Chapter D MAINTENANCE
D 100 - Safety instructions for product maintenance
D 150 - Maintenance frequency
Chapter E MAINTENANCE INSTRUCTIONS
E 50 - Replacement of the water valve coil
E 100 - Shipping procedure for contaminated pumps
Chapter F MAINTENANCE COMPONENTS
F 000 - Spare parts - Instructions of use
F 100 - First level maintenance parts
Chapter G APPENDIX
G 150 - Pumping curves
G 200 - Service
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MTadixen Vacuum Products - Operating instructions - ATH 2300 M/MT
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General contents
ATH 2300 M/MT Operating manual
GB 01718 - Edition 05 - Nov 12
MANUAL REFERENCE: 108895
EDITION: 06 - January 2013
Translated from original version
Indicates an imminently hazardous situation that, if not avoided, will
result in death or severe injury (extreme situations).
The performance and operational safety of this product are guaranteed pro-
vided it is used normally in the operating conditions defined in this manual.
It is the customer’s task to:
- train operators to use the product if they do not speak the language the
manual is written in,
- ensure operators know the safe practices to apply when using the
product.
Before switching on the product, study the Operating instructions and make
sure you follow the safety instructions it gives. You can recognise these by
the ‘Caution’, ‘Warning’ and ‘Danger’ symbols.
Good practice tips and manufacturer’s recommendations are in a blue box.
Symbols, labels Description
Warning : hot surface
Warning : hazardous voltage
Caution : risk of danger. Refer to the operating
instructions before use
ON
OFF
Do not touch when the pump is running
Use of glove is recommended
Moving parts present
Heavy object
Lock the electrical connector before using the
pump and during operation
Purge Purge port
Pump exhaust Exhaust of the pump
Water Water cooling circuit connection
Water max Pr.7 bar/101 psi Max. cooling water pressure
Direction of rotation of the pump
LOCK
adixen Vacuum Products - Operating instructions - ATH 2300 M/MTadixen Vacuum Products - Operating instructions - ATH 2300 M/MT
GB 01719 - Edition 04 - Nov 12
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Introduction
ATH 2300 M/MT Operating manual
Detailed contents
A
A 150 Introduction to the ATH 2300 M/MT pumps
A 200 Control loop of the pump
- 5 actives axis
- Unbalanced force rejection control
A 210 The pump operating principle
- Pumping principle
- The hybrid-turbo pump in an installation
- The back-up ball bearings
- No maintenance
- Battery free
- Variation of the pump rotational speed
A 400 Technical characteristics of the pump
A 510 The accessories of the pump
A 515 Pump accessory dimensions
- Purge valve (50 sccm) dimensions
- Air inlet valve dimensions
- Water valve dimensions
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT
GB 01720 - Edition 05 - Nov 12
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A 150
Introduction to the ATH 2300 M/MT
pumps
1 magnetically
levitated hybrid
turbo pump
Five active axes
Rotor position control in 5 directions.
Automatic balancing system
Lowest possible levels of noise and vibration.
Compensation for any imbalance of the rotor.
Maintenance free
Inert gas purge
Eliminate corrosion of the motor and magnetic bearing coils.
Battery free
In case of a power failure, the pump motor acts like a generator
to transform the rotor energy into electrical power to supply the
controller.
ATH 2300 M
ATH 2300 MT Integrated heater band
Maintaining the pumps internal surface up to 75 °C to prevent the
condensation effect.
Temperature regulated by the controller. The MT version is supplied
with a water valve.
Controllers The ATH 2300 M/MT pumps work with the OBC controller or with
the MAGPOWER controller.
(refer to the operating instructions corresponding).
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT
5 active axis The mobile assembly formed by the turbo rotor and the shaft is
known as the rotor. The rotor is driven by the motor and held
in suspension by magnetic fields generated by electromagnets
housed in an active bearing.
The mobile rotor has 5 axes of freedom monitored by 5 active
magnetic bearings.
+
Rotor
Stator
BearingElectronics
Power
amplifiers
Position of
Reference
Position return
Electro-
magnet
+
Correction
+
Position
sensor
Z
X
X
Y
Y
Movements in relation to these axes are monitored by
position sensors. According to the position data recorded, the
controller corrects differences to bring the rotor back to its
optimum position, by varying the current in electro-magnets.
3 controlled translations (X, Y, Z)
2 controlled tiltings (X, Y)
A 200
Control loop of the pump
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GB 02721 - Edition 04 - Aug 07
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT
Unbalanced force
rejection control
The unbalanced force rejection control is an electronic
function, that monitors the rotor position, allowing it to rotate
in its own axis of inertia.
Changes in the rotor balance, due to deposit built-up during
the life time of the pump, are automatically compensated by
the unbalanced force rejection control.
It ensures the lowest possible levels of noise and vibration.
Stator geometric axis
Rotor geometric axis
Rotor inertia axis
A 200
Control loop of the pump
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GB 02721 - Edition 04 - Aug 07
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT
GB 03411 - Edition 04 - November 12
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A 210
The pump operating principle
Pumping principle The ATHM pump integrates the advantages of a multi-staged
turbomolecular pump with a spiral helix molecular drag section.
The turbomolecular section provides high pumping speeds and
high ultimate vacuum. The molecular drag section provides a high
compression ratio and extends forevacuum tolerance.
INLET
Dry back-up bearings
EXHAUST
Cooling
Magnetic
levitated
bearings
Motor
Molecular
drag
Stator
Rotor
Gas purge*
* The gas purge provides an excellent protection of the maglev
bearings for corrosive applications and ensures the rotor cooling.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT
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